Large-scale production
of high-purity (90% or higher) SWNTs can be done using
the "High-Pressure
CO conversion" (HiPCO) method. In this method, a
gas mix of CO with a small amount of iron pentacabonyl
Fe(CO)5
catalytic particles, is continuously flowed through
high-pressure
heated carbon monoxide
(CO) gas in a quartz flow tube reactor,
operated at ~ 1200ºC. Because CO gas
is used as the primary gas source, CNTs produced by this
method contain no hydrocarbon and are considerably cleaner than
those from other catalyzed CVD processes. Houston, TX-based Carbon Nanotechnologies,
Inc., one of the leading CNT material manufacturers,
uses this technique to produce high-graded CNTs and
fluorinated SWNTs for supercapacitor electrodes and
biomedical sensors. Although the thermal CVD, PECVD and HiPCO methods provide feasible commercial-scale CNT manufacturing
solutions with high throughput and low-cost of ownership,
the key technical
challenge is the control of metallic contamination
originating from the catalyst as well as oxygen, hydrogen
and hydrocarbon from the reactant gases.
A high level of
impurities can have a significant impact on CNT quality and
cause additional
manufacturing costs for purification. In
nanoelectronics, the CVD method is considered to be
the "process of choice" because
selective CNTs can be grown on substrate using standard
microlithography processes. In addition, the CNT material can be doped
with elements including nitrogen, boron or potassium to
alter electronic properties which enable production of new types of active switching devices such
as field-effect transistors and
nanotube emitters. Munich, Germany-based Infineon Technologies AG (NYSE
ADR: IFX) is one of the first semiconductor
manufacturers to pioneer the low-temperature CCVD process to replace the conventional metal via
process, the vertical interconnects between two metal
layers in the chip, with ultra high current density CNT materials. Large
equipment manufacturers including Applied Materials (NASDAQ:AMAT)
and Novellus Systems (NASDAQ:NVLS) do not currently
offer catalyzed CVD solutions for CNT manufacturing.
In the United States, small production and research
thermal CVD and PECVD reactors are available from
specialized equipment companies such as a privately held
Carpinteria, CA-based First Nano, Inc. and Sunnyvale,
CA-based SEOCAL Inc. Direct Spinning from Chemical Vapor Deposition - Promising
novel technology for commercial-scale manufacturing of
continuous CNT fiber has been developed by a group of
research scientists at University of Cambridge, Ya-Li Li,
et al Science 304, 276–278 (2004). In
the direct spinning CVD technique, ethanol (C2H5OH)
is used as the carbon source. A gas mix of ethanol,
ferrocene (Fe(C5H5)2)
and thiophene (C4H4S)
vapors along with a hydrogen carrier gas are injected into
the top section of a vertical CVD reactor, operated in the
temperature range of 1050°C to 1200°C.
In the reactor hot
zone, the catalyzed reaction
causes a formation of an aerogel-like
substance, an ultra low-density solid which is composed of 99.8% air.
The SWNTs are then mechanically removed from the catalyzed reaction
zone by continuous wind-up. According to the research
scientists, unlimited length of high-grade SWNTs can be spun
using this technique.
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